FACILITIES

Digital Microscope

• Can measure a couple of micron size
• 3D surface profiling
• Various light exposure sets for the optimized image
• Tilt image

Scanning Electron Microscope (SEM)

• Normal SEM mode
• Variable pressure mode
• 7 sample holder
• Tilt and rotational function

DC Sputter

• Two targets
• Two consecutive metal deposition
• Turbo pump up to 10-6 torr within 15 minutes
• Crystal monitor

Projection Lithography

• Mask writing
• 5 µm feature size
• Gray scale mask writing
• Micropatterning on 3D surface

CO2 laser for Metal

• Laser power: 200W
• Working size: 1400*1000mm
• Cutting speed: 25-25,000mm/min.
• Repeating Location: ≤0.05mm
• All non-metal materials and ferrous metal, such as Carbon Steel, Stainless Steel (0.2-3mm), MDF board (10-20mm)

CO2 laser for non-metal

• Laser power:100W
• Working size: 900x600mm
• Rotary Axis for Engraving Machine with 80mm Tailstock
• Acrylic, Leather, Marble, Wood, Double-color sheet, Paper, Crystal, Fabric, Rubber, ABS, Lampshade, Tile, Jade, Bamboo etc.

3D Printers

• FDM and SLA printers
• PLA and Photosensitive epoxy
• 5.9” x 5.9” x 5.9 “ for FDM printer
• 20~400 microns

CNC Mill

• Automated 3D cutting
• Metal and non-metal

CNC Dicing/Cutting Saw

• Working dimension: 8” x 4” x 1”
• 4” wafer
• 2.5 µm moving resolution